Paperbase

V-groove plasmonic waveguides fabricated by nanoimprint lithography

Fernandez-Cuesta, Irene Nielsen, Rasmus Bundgaard Boltasseva, Alexandra Borrise, Xavier Perez-Murano, Francesc Kristensen, Anders

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 2007

https://doi.org/10.1116/1.2779041

Francesc Perez-Murano

Perez-Murano Francesc

ORCID: 0000-0002-4647-8558

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Preface 10.1016/j.mee.2007.01.051

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Alexandra Boltasseva

Boltasseva Alexandra

ORCID: 0000-0001-8905-2605

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Material platforms for optical metasurfaces 10.1515/nanoph-2017-0130

New Journal prize to recognize the best paper from an emerging researcher: editorial 10.1364/OME.8.001695

On-Chip Hybrid Photonic-Plasmonic Waveguides with Ultrathin Titanium Nitride Films 10.1021/acsphotonics.8b00885

Optical Time Reversal from Time-Dependent Epsilon-Near-Zero Media 10.1103/PhysRevLett.120.043902

Plasmonic Biomimetic Nanocomposite with Spontaneous Subwavelength Structuring as Broadband Absorbers 10.1021/acsenergylett.8b00583

Roadmap on plasmonics 10.1088/2040-8986/aaa114

Suppression of near-field coupling in plasmonic antennas on epsilon-near-zero substrates 10.1364/OPTICA.5.001557

Synchrotron radiation from an accelerating light pulse 10.1126/science.aat5915

The OMEx team: editorial 10.1364/OME.8.003953

Ultrabright Room-Temperature Sub-Nanosecond Emission from Single Nitrogen-Vacancy Centers Coupled to Nanopatch Antennas 10.1021/acs.nanolett.8b01415

Ultrathin and multicolour optical cavities with embedded metasurfaces 10.1038/s41467-018-05034-6

Broadband Hot-Electron Collection for Solar Water Splitting with Plasmonic Titanium Nitride 10.1002/adom.201601031

Controlling hybrid nonlinearities in transparent conducting oxides via two-colour excitation 10.1038/ncomms15829

Controlling hybrid nonlinearities in transparent conducting oxides via two-colour excitation (vol 8, 15829, 2017) 10.1038/ncomms16139

Dynamic nanophotonics [Invited] 10.1364/JOSAB.34.000095

Electron spin contrast of Purcell-enhanced nitrogen-vacancy ensembles in nanodiamonds 10.1103/PhysRevB.96.035146

Enhanced Graphene Photodetector with Fractal Metasurface 10.1021/acs.nanolett.6b03202

Evolution of Metallicity in Vanadium Dioxide by Creation of Oxygen Vacancies 10.1103/PhysRevApplied.7.034008

Feature issue introduction: material platforms and experimental approaches for quantum nanophotonics 10.1364/OME.7.000651

High-Performance Doped Silver Films: Overcoming Fundamental Material Limits for Nanophotonic Applications 10.1002/adma.201605177

Hybrid plasmonic waveguides formed by metal coating of dielectric ridges 10.1364/OE.25.012295

Large-Area Ultrabroadband Absorber for Solar Thermophotovoltaics Based on 3D Titanium Nitride Nanopillars 10.1002/adom.201700552

Lasing Action with Gold Nanorod Hyperbolic Metamaterials 10.1021/acsphotonics.7b00010

Material platforms for integrated quantum photonics 10.1364/OME.7.000111

Nanolasers Enabled by Metallic Nanoparticles: From Spasers to Random Lasers 10.1002/lpor.201700212

Optical Properties of Plasmonic Ultrathin TiN Films 10.1002/adom.201700065

Pancharatnam-Berry Phase Manipulating Metasurface for Visible Color Hologram Based on Low Loss Silver Thin Film 10.1002/adom.201700196

Patterned multilayer metamaterial for fast and efficient photon collection from dipolar emitters 10.1364/OL.42.003968

Patterning metamaterials for fast and efficient single-photon sources 10.1117/12.2253133

Plasmonic Titanium Nitride Nanostructures via Nitridation of Nanopatterned Titanium Dioxide 10.1002/adom.201600717

Surface-plasmon opto-magnetic field enhancement for all-optical magnetization switching 10.1364/OME.7.004316

Temperature-Dependent Optical Properties of Plasmonic Titanium Nitride Thin Films 10.1021/acsphotonics.7b00127

Temperature-Dependent Optical Properties of Single Crystalline and Polycrystalline Silver Thin Films 10.1021/acsphotonics.6b00886

Titanium Nitride based hybrid plasmonic-photonic waveguides for on-chip plasmonic interconnects 10.1117/12.2251931

Angled physical vapor deposition techniques for non-conformal thin films and three-dimensional structures 10.1557/mrc.2016.3

Controlling Random Lasing with Three-Dimensional Plasmonic Nanorod Metamaterials 10.1021/acs.nanolett.6b00034

Controlling the Polarization State of Light with Plasmonic Metal Oxide Metasurface 10.1021/acsnano.6b03937

Development of Optical Metasurfaces: Emerging Concepts and New Materials 10.1109/JPROC.2016.2590882

Electron energy loss spectroscopy of plasmon resonances in titanium nitride thin films 10.1063/1.4947442

Enhanced Nonlinear Refractive Index in epsilon-Near-Zero Materials 10.1103/PhysRevLett.116.233901

Long-range and rapid transport of individual nano-objects by a hybrid electrothermoplasmonic nanotweezer 10.1038/NNANO.2015.248

Near-infrared plasmonics with transparent conducting oxides (Conference Presentation) 10.1117/12.2228334

On-demand rapid transport and stable trapping of nanoparticles of nanoparticles by a hybrid electrothermoplasmonic nanotweezer (Conference Presentation) 10.1117/12.2238894

Plasmonics-turning loss into gain The optical losses associated with plasmonic materials could be used in applications 10.1126/science.aad9864

Quiet revolutions in optical materials enable breakthrough technologies: editorial 10.1364/OME.6.000288

Refractory plasmonics (Conference Presentation) 10.1117/12.2228382

Roadmap on optical metamaterials 10.1088/2040-8978/18/9/093005

Role of epsilon-near-zero substrates in the optical response of plasmonic antennas 10.1364/OPTICA.3.000339

Solar-Powered Plasmon-Enhanced Heterogeneous Catalysis 10.1515/nanoph-2016-0018

Temperature-dependent optical properties of gold thin films 10.1364/OME.6.002776

Adiabatically Tapered Hyperbolic Metamaterials for Dispersion Control of High-k Waves 10.1021/nl5038352

All that glitters need not be gold 10.1126/science.aaa8282

Alternative materials lead to practical nanophotonic components 10.1117/12.2189811

Colloidal Plasmonic Titanium Nitride Nanoparticles: Properties and Applications 10.1515/nanoph-2015-0017

Development of epitaxial AlxSc1-xN for artificially structured metal/semiconductor superlattice metamaterials 10.1002/pssb.201451314

Effect of photonic density of states on spin-flip induced fluorescence contrast in diamond nitrogen-vacancy center ensembles 10.1117/12.2187485

Effective third-order nonlinearities in metallic refractory titanium nitride thin films 10.1364/OME.5.002395

Effective third-order nonlinearities in metallic refractory titanium nitride thin films (vol 5, pg 2395, 2015) 10.1364/OME.5.002587

Electrothermoplasmonic flow for plasm on-assisted optical trapping 10.1117/12.2189844

Enhancement of single-photon emission from nitrogen-vacancy centers with TiN/(Al,Sc)N hyperbolic metamaterial 10.1002/lpor.201400185

Epsilon-near-zero Al-doped ZnO for ultrafast switching at telecom wavelengths 10.1364/OPTICA.2.000616

Examining nanophotonics for integrated hybrid systems: a review of plasmonic interconnects and modulators using traditional and alternative materials [Invited] 10.1364/JOSAB.32.000121

Feature issue introduction: plasmonics 10.1364/OME.5.002698

Finite-width plasmonic waveguides with hyperbolic multilayer cladding 10.1364/OE.23.009681

Graphene: A Dynamic Platform for Electrical Control of Plasmonic Resonance 10.1515/nanoph-2015-0014

Gyroidal titanium nitride as nonmetallic metamaterial 10.1364/OME.5.001316

Long-range plasmonic waveguides with hyperbolic cladding 10.1364/OE.23.031109

Nanoparticle plasmonics: going practical with transition metal nitrides 10.1016/j.mattod.2014.10.039

Nitrogen-vacancy single-photon emission enhanced with nanophotonic structures 10.1117/12.2190251

Plasmon resonance in multilayer graphene nanoribbons 10.1002/lpor.201500058

Plasmonics feature issue: publisher's note 10.1364/OME.5.002978

Plasmonics on the slope of enlightenment: the role of transition metal nitrides 10.1039/c4fd00208c

Quasi-coherent thermal emitter based on refractory plasmonic materials 10.1364/OME.5.002721

Transparent conducting oxides as plasmonic component in near infrared 10.1117/12.2189922

Transparent conducting oxides for electro-optical plasmonic modulators 10.1515/nanoph-2015-0004

Ultrabroadband terahertz conductivity of highly doped ZnO and ITO 10.1364/OME.5.000566

Ultrafast dynamics of Al-doped zinc oxide under optical excitation 10.1117/12.2188175

Zinc Oxide Based Plasmonic Multilayer Resonator: Localized and Gap Surface Plasmon in the infrared 10.1021/acsphotonics.5b00318

Alternative Plasmonic Materials 10.1016/B978-0-444-59526-3.00006-9

Efficient Light Bending with Isotropic Metamaterial Huygens' Surfaces 10.1021/nl5001746

Electrical Modulation of Fano Resonance in Plasmonic Nanostructures Using Graphene 10.1021/nl403253c

Empowering plasmonics and metamaterials technology with new material platforms 10.1557/mrs.2014.91

Epitaxial superlattices with titanium nitride as a plasmonic component for optical hyperbolic metamaterials 10.1073/pnas.1319446111

Experimental demonstration of titanium nitride plasmonic interconnects 10.1364/OE.22.012238

High-power operation of silica-based Raman fiber amplifier at 2147 nm 10.1364/OE.22.028383

Optical absorption of hyperbolic metamaterial with stochastic surfaces 10.1364/OE.22.008893

Photothermal Heating Enabled by Plasmonic Nanostructures for Electrokinetic Manipulation and Sorting of Particles 10.1021/nn502294w

Plasmonic waveguides cladded by hyperbolic metamaterials 10.1364/OL.39.004663

Refractory Plasmonics 10.1126/science.1252722

Refractory Plasmonics with Titanium Nitride: Broadband Metamaterial Absorber 10.1002/adma.201401874

TiN/(Al,Sc)N metal/dielectric superlattices and multilayers as hyperbolic metamaterials in the visible spectral range 10.1103/PhysRevB.90.125420

Alternative Plasmonic Materials: Beyond Gold and Silver 10.1002/adma.201205076

Electronic and optical properties of ScN and (Sc,Mn)N thin films deposited by reactive DC-magnetron sputtering 10.1063/1.4817715

Local Heating with Lithographically Fabricated Plasmonic Titanium Nitride Nanoparticles 10.1021/nl4033457

Negative permittivity of ZnO thin films prepared from aluminum and gallium doped ceramics via pulsed-laser deposition 10.1007/s00339-012-7198-6

Optical Properties of Gallium-Doped Zinc Oxide-A Low-Loss Plasmonic Material: First-Principles Theory and Experiment 10.1103/PhysRevX.3.041037

Planar Photonics with Metasurfaces 10.1126/science.1232009

Plasmonic Resonances in Nanostructured Transparent Conducting Oxide Films 10.1109/JSTQE.2013.2238611

Shape-Dependent Plasmonic Response and Directed Self-Assembly in a New Semiconductor Building Block, Indium-Doped Cadmium Oxide (ICO) 10.1021/nl4012003

Titanium nitride as a plasmonic material for visible and near-infrared wavelengths 10.1364/OME.3.001658

Towards CMOS-compatible nanophotonics: Ultra-compact modulators using alternative plasmonic materials 10.1364/OE.21.027326

Broadband Light Bending with Plasmonic Nanoantennas 10.1126/science.1214686

Demonstration of Al:ZnO as a plasmonic component for near-infrared metamaterials 10.1073/pnas.1121517109

Electrically Tunable Damping of Plasmonic Resonances with Graphene 10.1021/nl302322t

Improving the radiative decay rate for dye molecules with hyperbolic metamaterials 10.1364/OE.20.008100

Optical Functions of Nanocrystalline ZnO Containing Voids and doped with Ga 10.1117/12.929866

Performance analysis of nitride alternative plasmonic materials for localized surface plasmon applications 10.1007/s00340-012-4955-3

Reflecting upon the losses in plasmonics and metamaterials 10.1557/mrs.2012.173

Titanium nitride as a plasmonic material for visible and near-infrared wavelengths 10.1364/OME.2.000478

Characterization of nanodiamonds for metamaterial applications 10.1007/s00340-011-4718-6

Effect of metallic and hyperbolic metamaterial surfaces on electric and magnetic dipole emission transitions 10.1007/s00340-011-4468-5

Low-Loss Plasmonic Metamaterials 10.1126/science.1198258

Oxides and nitrides as alternative plasmonic materials in the optical range [Invited] 10.1364/OME.1.001090

Studies of plasmonic hot-spot translation by a metal-dielectric layered superlens 10.1117/12.894225

Demonstration of scattering suppression in retardation-based plasmonic nanoantennas 10.1364/OE.18.014802

Engineering photonic density of states using metamaterials 10.1007/s00340-010-4096-5

Investigations of scattering and field enhancement effects in retardation-based plasmonic nanoantennas 10.1117/12.868363

Metal-dielectric composites with tunable optical properties 10.1117/12.855826

Optimizing performance of plasmonic devices for photonic circuits 10.1007/s00339-010-5862-2

Searching for better plasmonic materials 10.1002/lpor.200900055

Semiconductor Plasmonic Metamaterials for Near-Infrared and Telecommunication Wavelength 10.1117/12.863631

Semiconductors for plasmonics and metamaterials 10.1002/pssr.201004269

The validation of the parallel three-dimensional solver for analysis of optical plasmonic bi-periodic multilayer nanostructures 10.1007/s00339-010-5865-z

Toward superlensing with metal-dielectric composites and multilayers 10.1007/s00340-010-4065-z

Demonstration of Quadrature-Squeezed Surface Plasmons in a Gold Waveguide 10.1103/PhysRevLett.102.246802

Efficient unidirectional ridge excitation of surface plasmons 10.1364/OE.17.007228

Excitation of fluorescent nanoparticles by channel plasmon polaritons propagating in V-grooves 10.1063/1.3262945

Experimental Investigation of Fang's Ag Superlens suitable for Integration 10.1117/12.825940

Fabricating Plasmonic Components for Nano- and Meta-Photonics 10.1007/978-1-4020-9407-1_16

Plasmonic components fabrication via nanoimprint 10.1088/1464-4258/11/11/114001

Plasmonic metasurfaces for waveguiding and field enhancement 10.1002/lpor.200810071

Theoretical analysis and experimental demonstration of resonant light scattering from metal nanostrips on quartz 10.1364/JOSAB.26.000121

Thin film Ag superlens towards lab-on-a-chip integration 10.1364/OE.17.022543

Two-photon imaging of field enhancement by groups of gold nanostrip antennas 10.1364/JOSAB.26.002199

Channel plasmon polariton propagation in nanoimprinted V-groove waveguides 10.1364/OL.33.002800

Compact plasmonic variable optical attenuator 10.1364/OE.16.015546

Efficiency of local surface plasmon polariton excitation on ridges 10.1103/PhysRevB.78.115115

Efficiency of local surface plasmon polariton excitation on ridges 10.1117/12.780509

Enhanced localized fluorescence in plasmonic nanoantennae 10.1063/1.2836271

Fabrication of plasmonic waveguides by nanoimprint and UV-lithography 10.1117/12.762999

Nanoantenna array-induced fluorescence enhancement and reduced lifetimes 10.1088/1367-2630/10/12/125022

Nonlinear microscopy of localized field enhancements in fractal shaped periodic metal nanostructures 10.1364/JOSAB.25.001585

Refracting surface plasmon polaritons with nanoparticle arrays 10.1364/OE.16.003924

Slow-light plasmonic metal nano-strip resonators 10.1117/12.804820

Slow-plasmon resonant-nanostrip antennas: Analysis and demonstration 10.1103/PhysRevB.77.115420

Triangular metal wedges for subwavelength plasmon-polariton guiding at telecom wavelengths 10.1364/OE.16.005252

Two-photon mapping of localized field enhancements in thin nanostrip antennas 10.1364/OE.16.017302

A negative permeability material at red light 10.1364/OE.15.001076

Fabrication of plasmonic waveguides for device applications 10.1117/12.732836

Localized field enhancements in fractal shaped periodic metal nanostructures 10.1364/OE.15.015234

Nanoimprinted reflecting gratings for long-range surface plasmon polaritons 10.1016/j.mee.2007.01.110

Near-field excitation of nanoantenna resonance 10.1364/OE.15.013682

Surface plasmon polariton beam focusing with parabolic nanoparticle chains 10.1364/OE.15.006576

V-groove plasmonic waveguides fabricated by nanoimprint lithography 10.1116/1.2779041

Compact Bragg gratings for long-range surface plasmon polaritons 10.1109/JLT.2005.862470

Directional couplers using long-range surface plasmon polariton waveguides 10.1109/JSTQE.2006.882659

Long-range surface plasmon polariton nanowire waveguides for device applications 10.1364/OPEX.14.000314

Long-range surface plasmon polariton waveguides with TE and TM guiding 10.1117/12.678481

Theoretical analysis of ridge gratings for long-range surface plasmon polaritons 10.1103/PhysRevB.73.045320

Compact Z-add-drop wavelength filters for long-range surface plasmon polaritons 10.1364/OPEX.13.004237

Integrated optical components utilizing long-range surface plasmon polaritons 10.1109/JLT.2004.835749

Photonic bandgap structures for long-range surface plasmon polaritons 10.1016/j.optcom.2005.02.027

Propagation of long-range surface plasmon polaritons in photonic crystals 10.1364/JOSAB.22.002027

Computational lens for the near field 10.1103/PhysRevLett.92.163903

Experimental studies of surface plasmon polariton band gap effect 10.1046/j.1365-2818.2003.01165.x

Local excitation of surface plasmon polaritons in random surface nanostructures 10.1016/S0030-4018(03)01623-7

Surface plasmon polariton waveguiding in random surface nanostructures 10.1046/j.1365-2818.2003.01109.x

Direct mapping of light propagation in photonic crystal waveguides 10.1016/S0030-4018(02)01861-8

Low-loss silicon-on-insulator photonic crystal waveguides 10.1049/el:20020188

Near-field imaging of light propagation in photonic crystal waveguides: Explicit role of Bloch harmonics 10.1103/PhysRevB.66.235204

Bend loss in surface plasmon polariton band-gap structures 10.1063/1.1389507

Broad Frequency Shift of Parametric Processes in Epsilon-Near-Zero Time-Varying Media 10.3390/app10041318

Machine-learning-assisted metasurface design for high-efficiency thermal emitter optimization 10.1063/1.5134792

Determining plasmonic hot-carrier energy distributions via single-molecule transport measurements 10.1126/science.abb3457

Enhancing the graphene photocurrent using surface plasmons and a p-n junction 10.1038/s41377-020-00344-1

Rapid Classification of Quantum Sources Enabled by Machine Learning 10.1002/qute.202000067

Deep learning for the design of photonic structures 10.1038/s41566-020-0685-y

Lithography-Free Plasmonic Color Printing with Femtosecond Laser on Semicontinuous Silver Films 10.1021/acsphotonics.0c01506

Machine Learning for Integrated Quantum Photonics 10.1021/acsphotonics.0c00960

Mark Stockman, the knight of plasmonics 10.1038/s41566-021-00799-7

High-harmonic generation in metallic titanium nitride 10.1038/s41467-021-25224-z

Xavier Borrisé

Borrisé Xavier

ORCID: 0000-0002-6491-4763

Determination of heterogeneous electron transfer rate constants at interdigitated nanoband electrodes fabricated by an optical mix-and-match process 10.1016/j.snb.2013.12.016

Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation 10.1088/0957-4484/25/13/135302

Field-effect control of breakdown paths in HfO2 based MIM structures 10.1016/j.microre1.2013.07.061

Functional oxide nanostructures written by EBL on insulating single crystal substrates 10.1016/j.mee.2013.02.032

Contact end resistance test structure applied for nanocontact measurements 10.1016/j.mee.2012.05.013

Real time protein recognition in a liquid-gated carbon nanotube field-effect transistor modified with aptamers 10.1039/c2nr31257c

Fabrication Of Nanomechanical Devices Integrated In CMOS Circuits By Ion Beam Exposure Of Silicon 10.1063/1.3586095

Batch wafer scale fabrication of passivated carbon nanotube transistors for electrochemical sensing applications 10.1116/1.3504527

Biomolecule Patterning on Analytical Devices: A Microfabrication-Compatible Approach 10.1021/la904527s

DNA hybridization detection by electrochemical impedance spectroscopy using interdigitated gold nanoelectrodes 10.1007/s00604-010-0358-5

Pattern transfer optimization for the fabrication of arrays of silicon nanowires 10.1016/j.mee.2009.11.086

Electron- and ion-beam lithography for the fabrication of nanomechanical devices integrated on CMOS circuits 10.1016/j.mee.2009.01.006

Excitation of fluorescent nanoparticles by channel plasmon polaritons propagating in V-grooves 10.1063/1.3262945

Fabrication of complementary metal-oxide-semiconductor integrated nanomechanical devices by ion beam patterning 10.1116/1.3253550

Mass Transport to Nanoelectrode Arrays and Limitations of the Diffusion Domain Approach: Theory and Experiment 10.1021/jp9031354